The best thing you can do is not rush. Just take however long time you need. Take 2 or 3 bounces (whatever is more comfortable), steady yourself before shooting. Have a routine, stick to that routine. I like to step away after my first free throw, then set myself up once I get the ball returned to me. This way your aren't anchored to the spot and can re-set for the next.
Then once you have something that feels comfortable, just repeat the same thing over and over. Learn how a good shot feels, learn how a bad shot feels. You should pretty much know if a shot is going in by the feel.
Try make practice as game like as possible. Put pressure on yourself to make shots in practice, that way you have the same emotions going in the game situation.